Surface Profilometry: Wyko NT3300

Description:

The Wyko NT3300 combines non-contact interferometry with advanced automation for highly accurate, fast, 3D surface topography measurements from 0.1 nm up to 2 mm.

wyko nt3300 machine


An interferometer is an optical device that divides a beam of light exiting a single source into two beams and recombines them to create an interference pattern. A lens system images the interferogram onto a CCD camera. The interference fringes form bands of contour of equal height on the surface. In combination with a microscope, it allows roughness measurement of surfaces with very high precision. Depending on the measurement technique used (Vertical Scanning Interferometry or Phase-Shift Interferometry) and sample flatness/roughness, a height resolution at the sub nanometer level can be achieved. This equipment is suited for step measurements (e.g. in microelectronics), 3D measurements (e.g. MEMS), roughness, planarity, waviness measurements (e.g. on mechanical parts), and the measurement of volumes (e.g. in tribology, on cutting tools). The spatial sampling interval in X,Y is related to the enlargement and ranges from approximately 0.1 µm to 10 µm. The measurement time is short and the data analyses are affected by the height, the measurement speed and the measured surface size (stitching).

Technical details:
SYSTEM

  • Measurement Techniques: optical phase-shifting and white light vertical scanning interferometry

  • Measurement Capability: three-dimensional, non-contact, surface profile measurements

  • Objectives: 5.0X, 10X, 50X on auto-sensing motorized turret

  • Measurement Array: user-selectable, maximum array: 736 x 480

  • Light Source: tungsten halogen lamp (user-replaceable); automated filter selection

  • Stage:
          - automated ± 4 inch (101.6 mm) X/Y translation, with feedback positioning encoders
          - automated ± 6° tip/tilt head

  • Optical Assembly:
    integrated, computer-controlled illuminator; automated discrete zoom (FOV’s: 0.5X, 1.0X, 1.5X) with magnification sensing; closed-loop precision vertical scanning assembly

  • Video Display:
    9 inch (230 mm) RS170 monochrome monitor

  • Computer System:
    PC with Penthium processor, 17” monitor

  • Software:
    Wyko Vision32 software running under Microsoft Windows NT
 
PERFORMANCE

  • Vertical Measurement Range:
    0.1 nm to 2 mm

  • Vertical Resolution:
    < 1 Å Ra

  • RMS Repeatability:
    < 0.01 nm

  • Scan Speed:
    up to 7.2 µm/sec (288µin/sec)

  • Lateral Spatial Sampling:
    ~0.11 x 0.06 µm to 3.36 x 3.92 µm

  • Field-of-view:
    ~2.47 x 1.88 mm to 0.08 x 0.06 mm

  • Maximum Slope:
    25° to 5.6°

  • Reflectivity:
    1% to 100%













Responsible persons:
     scientific: Jean-Pierre Celis (-32-16-321312)
     technical: Marc Peeters (-32-16-321215)

 Room: 01.01

 
More Technical information: Techinfo@mtm.kuleuven.be
 

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27-05-2010